The Effect of Magnetic Field Strength in DC Magnetron
CENTRAL ASIAN JOURNAL OF THEORETICAL AND APPLIED SCIENCE, 4 (2):
61-67 (February 2023)Abstract
Plasma parameters (electronic temperature , electronic density ( ), electronic cyclotron frequency, ionic cyclotron frequency, electronic gyro radius, ionic gyro radius, drift velocity ( ), plasma potential ( ), were determined under the effect of magnetic field strengths ((0.021-0.062) Tesla) in homemade magnetron sputtering system and discussed to improve the operation of it. Argon gas pressures is (0.5 mbar), a single langmuir probe was used as diagnostic tool. Generally it's found that the behaviors of the electronic temperature, the electronic and ionic gyro radius and the plasma potential decrease with increasing the magnetic field strengths, but the electronic density, electronic and ionic cyclotron frequencies and the floating potential increase with increasing the magnetic field strengths.